On August 25th (Sat) and 26th (Sun), blackout will be implemented throughout the Johoku campus.
Along with that, the iPERC CR will be banned from entering the following schedule.
· 25 – 26th: Simultaneous blackout
· 27 – 28th: Air conditioning maintenance inspection
· 29 – 31st: Special gas supply equipment inspection, Air compressor maintenance inspection
Resumption of use of each device is planned after inspection on 31st.
However, since the EB Lithography System requires several days for the startup operation, it is scheduled to resume the next week.
We will inform you again when there is an update of information.