• ECRスパッタ装置利用再開のおしらせ※注意事項あり


    部品交換の影響により、10.output controlの調整が難しくなっております。

  • ECR restoration

    The restoration of the vacuum anomaly has been completed.
    Use of the system will be resumed.

    Due to the replacement of parts, it is difficult to adjust the 10.output control.
    Please be sure to check the output control in the presence of the Management Office before using the room for the first time after the reopening.