English ver.

Welcome to Micro/Nano Mechatronics Laboratory website in Shizuoka University at Hamamatsu campus! We study nano-micro measurement technologies and fabrication processes based on microscopes (e.g. scanning probe microscope; optical microscope; scanning electron microscope). We are seeking highly motivated prospective undergrad, master course, and PhD students. If you are interested in our lab., please send us E-mail.

                         Professor Futoshi Iwata: iwata.futoshi(at)shizuoka.ac.jp [(at)->@]

                         Assistant professor Kenta Nakazawa: nakazawa.kenta(at)shizuoka.ac.jp [(at)->@]

Please see about admissions :   http://www.shizuoka.ac.jp/english/admission/index.html


Current Research Topics      Publication list

〇 Biomaterial measurement using a scanning ion conductance microscope (SICM)

An optical microscope is frequently used to observe a biomaterial in liquid environment. Here, scanning ion conductance microscope (SICM) becomes a more suitable tool because spatial resolution of SICM depends on a nano pipet whose diameter of a few hundreds. In this laboratory, a measurement system of SICM was improved to a biological sample with a high aspect ratio. Recently, a surface charge mapping based on an ion current was combined with SICM using a theta nano pipet.

Ref:T. Ushiki and F. iwata et al., “Scanning ion conductance microscopy for imaging biological samples in liquid: A comparative study with atomic force microscopy and scanning electron microscopy”, Micron, 43, 12, 1390-1398 (2012)


〇 Operand measurement of semiconductor devices using AFM/KFM

An atomic force microscope (AFM) is a suitable tool to evaluate semiconductor devices such as diodes and transistors with a nano-scale structure. In this laboratory, actual devices were measured using a home build frequency modulation (FM) AFM combined with Kelvin probe force microscopy (KFM) and scanning capacitance force microscopy (SCFM). Electrical characteristics of the devices revealed by KFM and SCFM are important information to develop novel structure devices.

Ref: T. Uruma and F. Iwata et al., “Investigation of an n-layer in a silicon fast recovery diode under applied bias voltages using Kelvin probe force microscopy”, Jpn. J. Appl. Phys. 57,8S1, 08NB11-1-08NB11-5 (2018)


〇 Micro, nano-Manipulation based on a SPM

A cantilever of an AFM is used as a manipulator to fabricate a nano-scale structure. However, the manipulation process spends a very long time due to a conventional AFM taking few minute to obtain an image. In this laboratory, micro structures (e. g. Au nanoparticle; carbon nanotube) were manipulated in real time using a high-speed AFM technique combined with force feedback with a haptic device.

Ref: F. Iwata et al., “Development of nanomanipulator using a high-speed atomic force micro scope coupled with a haptic device”, Ultramicroscopy 133, 88-94 (2013)


〇 Atmospheric plasma nanometer-scale local processing based on SPM

The plasma jet generated under the atmospheric pressure is used for etching processes. The fine positioning is conducted by the mechanism based on the SPM. The plasma is focused by the nanopipette in nanometer scale. The dot and line fine maskless patternings are realized.











Ref: D. Morimatsu and F. Iwata et al., ”Development of a scanning nanopipette probe microscope for fine processing using atmospheric pressure plasma jet″, Jpn. J. Appl. Phys. 55, 08NB15 (2016)


〇 Laser trapping metal deposition

The three-dimensional metal nano-printing assisted by the laser trapping is developed. The printing is conducted in the metal colloidal media. The metal colloid is captured by the focused laser beam and deposited on the substrate by the electrophoresis. The three-dimensional structures such as pillar, wall, spring were successfully fabricated.

Ref: T. Takai, H. Nakao, and F. Iwata, “Three-dimensional microfabrication using local electrophoresis deposition and a laser trapping technique”, Optics Express 22(23) 28109-28117(2014)


Key words

Scanning probe microscope (SPM), Atomic force microscope (AFM), Kelvin probe force microscope (KFM), Scanning capacitance force microscope (SCFM), Scanning ion conductance microscope (SICM), High speed atomic force microscope (HS-AFM), Scanning electron microscope (SEM), Manipulation, Atmospheric pressure plasma jet (APPJ), Laser trapping, Microelectromechanical Systems (MEMS)