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  • 用力設備定期点検が当初の予定よりも早く終了したことに伴い、
    クリーンルーム装置の利用再開日程を下記に変更いたします。

    ・クリーンルーム利用再開
    　7月3日(月)8時～

    ・電子線描画装置
    　7月4日(火)12時～

    ・ECRスパッタ装置、電子ビーム蒸着装置
    　7月3日(月)装置立上げ予定

  • The periodic inspection of the power equipment has been completed earlier than originally scheduled,
    The schedule for the resumption of clean room equipment use has been changed as follows.

    Resumption of clean room equipment use
    　Monday, July 3, from 8:00 a.m.

    Reopening of the lithography equipment
    　Tuesday, July 4, from 12:00 p.m.

    ECR sputtering equipment and electron beam deposition equipment
    　Equipment start-up scheduled for July 3 (Mon.)